產品系列
晶圓盒.光罩盒.清洗機 Foup & cassette cleaner
晶圓盒.光罩盒.清洗機 Foup & cassette cleaner
晶圓盒.光罩盒.清洗機 Foup & cassette cleaner
DETAIL詳細介紹
Features:
SEMI standard class 1 cleaning spec.
Class 1 cleanroom compatible.
Clean: SMIF POD/RSP mask POD/ cassette/FOUP/FOSB.
High throughput: 72pcs 8" cassette & 12pcs 12" FOUP per run.
