產品系列
DETAIL詳細介紹
無塵室廠務端 .設備端用化學氣體過濾器 / Chemical filter
內容: 可過濾廠內及機台酸、鹼有機氣體、避免產生結晶物或化學污染
對光罩或晶圓、機台零件產生霧化.或不良影響.
Content: Our chemical filter can prevent haze or other pollution during wafer / mask process in clean room.